新加坡国立大学Lee Chengkuo教授关于Advanced Micro-Electro-Mechanical System (MEMS) and Sensor Technology的系列学术报告

第一期报告题目：Introduction of sensors and MEMS

报告时间：2022年5月16日18:00-20:30

腾讯会议：150-737-113

报告人简介：Lee Chengkuo,Director of Center for Intelligent Sensors and MEMS, NUS. Global Foundries Chair Professor, Dept. of Electrical and Computer Engineering, NUS. His main research fields involve optical infrared microelectromechanical systems for consumer applications and environmental monitoring; human-machine interfaces based on self-powered wearable and IoT sensors; triboelectric and piezoelectric energy harvesters; biomaterials for implantable applications Medical micro-nano electromechanical system sensors; nanophotonics; terahertz metamaterials; microfluidics and lab-on-a-chip; micro-nano technology for transdermal drug delivery; devices and instruments for neural interface research and neural cell characterization, etc. He has published more than 380 high-impact journal publications, including in Nature Photonics, Nature Communications, Science Advances, ACS Nano, covering many fields. Over 35 US and Taiwan patents granted. Over 16,000 citations (Google Scholar), h-index 65 and i-10 index 336.

报告简介：

第一期：Introduction of sensors and MEMS

Modern sensors and microelectromechanical systems (MEMS) have been widely used in internet of things (IoT), smart home, VR/AR, industry 4.0 and healthcare applications. From the historical milestones, the advanced sensors and MEMS will be highlighted in the 1^stlecture.

第二期：MEMS fabrication technology and MEMS sensing mechanisms.

To fabricate the silicon based miniaturization microsystems, unique MEMS fabrication technology evolves from the microelectronic process technology in thesemiconductor industrywill be highlighted. The working mechanisms of Si MEMS sensors including capacitive sensing and piezoresistive sensing are introduced, and a few cutting-edge applications are provided.

第三期：Sensors and MEMS for Smart Phones and Automotives

The current smart phones become the common platform for users due to advanced functions enabled by sensors and MEMS, e.g., accelerometer, gyroscope, and pressure sensor, etc. In addition to the commercialized sensors and applications, piezoelectric MEMS technology is highlighted too.

第四期：Energy Harvesting and self-powered Sensors.

Various energy harvesting mechanisms, such as piezoelectric, triboelectric, and thermoelectric, etc., are investigated for harvesting the abundant energies ranging from mechanical vibration, shock to heat. In addition, based on the self-generated signals from energy harvesters in response to the external stimuli, the self-powered sensors are realized for long-term sustainability.

第五期：Wearable Sensors and IoT Sensors

Starting from various wearable physical sensors in gesture recognition and healthcare applications, the wearable sensors have been investigated as novel human machine interfaces (HMIs) for robotic control. With the aid of IoT framework, many sensors can provide the collective information of various parameters, such as motions, tactile, humidity, temperature, gases, etc., to enable digital twin and smart home applications.

第六期：AIoT Sensors and Future Applications

By having the cloud AI server to support the deep learning data analytics, IoT sensors become advanced AIoT sensors. Using the AIoT sensors, HMIs and smart mats, the next generation of smart home is demonstrated when the integrated sensory information can offer a comprehensive perception, control and communication between the real space and virtual space.

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轮机工程学院

2022年5月11日